Abstract: I welcome you to the fourth issue of the IEEE Communications Surveys and Tutorials in 2021. This issue includes 23 papers covering different aspects of communication networks. In particular, ...
Abstract: In sub-28-nm nodes, existing optical critical dimension (OCD) metrology tools are challenging to simultaneously and thoroughly meet the metrology requirements of the wafer-level ...
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Czech Advanced Technology and Research Institute, Regional Centre of Advanced Technologies and Materials, Palacký University Olomouc, Šlechtitelů 27, 77900 Olomouc, Czech Republic ...
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